PDS Photoresist dispensing pump



Max. Discharge Capacity:5 ml/shot

PDS Photoresist dispensing pump

Repeatable accuracy of 0.3% of discharge volume maintained at all times

Repeated precision: ±0.3% (F.S.)

Linearity: ±0.5% (F.S.)

Resolution: 0.01 ml or below


For more information about applications relating to the PDS pump, please email customer service at info@iwakiamerica.com
Watch animation of Tubephragm Technology Tubephragm Technology Explained
  • Superior resist handling - The use of high-torque, stepper motor technology results in a consistent controllable discharge volume. The discharge volume is not affected by changes in viscosity or by filter performance.

  • High Purity - The pump end utilizes a tubephragm design eliminating dead volume and low velocity areas where resist can stagnate. This prevents the collection of particles and allows the pumps to maintain the highest purity possible.

  • Flexibility in Applications - The discharge velocity as well as volume are easily adjusted to expand the capabilities to many resist-coating processes, including the application of small amounts of resist in a short period of time.

Discharge Capacity
5 mL/shot
Max. Discharge Pressure
0.15 MPa
Liquid temperature range
15 to -25°C
Discharge speed
0.1 to 4.0 mL/sec
Suction speed
0.1 to 3.0 mL/sec
Power supply
24 VDC
Main materials